Seminar - MEMS Technology: a general overview of history, working principles, micro-fabrication techniques and applications in the sensors and actuators field

The seminar will be given by Dr. Jacopo Iannacci, Fondazione Bruno Kessler, Trento, Italy, as part of the course "Progetto di Elettronica e Telecomunicazioni LM."

  • Date: 17 November 2016 from 14:00 to 17:00

  • Event location: Room G1P, School of Engineering and Architecture, Via Genova 181, Cesena (FC)

Contact Name:

Contact Phone: +39 0547 339128

About the speaker

Jacopo Iannacci is Researcher in MEMS technology at the Fondazione Bruno Kessler (FBK) in Trento, Italy, where he focuses on (compact) modeling, design, optimization, integration, packaging and testing for reliability of MEMS/RF-MEMS devices and networks for sensors/actuators, energy harvesting and telecommunication systems. He received the MSc Degree in Electronic Engineering (2003) and the PhD in Information Technology (2007) from the ARCES Research Center at the University of Bologna, Italy, and worked as Visiting Researcher (2005-2006) at the DIMES Technology Center of the Technical University of Delft, the Netherlands, on development of packaging and integration solutions for RF-MEMS devices. Jacopo Iannacci authored and co-authored numerous scientific contributions for international journals and conference proceedings, as well as books and several book chapters in the field of MEMS and RF-MEMS technology.

Abstract

MicroElectroMechanical-Systems (MEMS) devices are steadily exploited in several sensing applications since years, while they are rapidly emerging in novel fields of application, representing, in some cases, a key-enabling technology. This depicts a rather diverse scenario that is worthy of further investigation. The seminar will provide an overview on MicroElectroMechanical-Systems (MEMS) through a review of history, applications and principles of fabrication. Micro-fabrication techniques will be discussed in detail. Finally, applications of MEMS in the fields of Sensors, Actuators, RF applications (i.e. RF-MEMS), and Energy Harvesting will be discussed.